Mechanical Abrasion by Bi-layered Pad Micro-Asperity in Chemical Mechanical Polishing
Hyun Jun Ryu, Dong Geun Kim, Sukkyung Kang, Ji‐hun Jeong, Sanha Kim
Topics & Concepts
Asperity (geotechnical engineering)PolishingMaterials scienceAbrasion (mechanical)Chemical-mechanical planarizationAbrasiveIndentationContact mechanicsComposite materialMolding (decorative)TribologyContact areaMechanical engineeringStructural engineeringFinite element methodEngineeringAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationDiamond and Carbon-based Materials Research