Thickness-Dependent Structural and Electrical Properties of WS<sub>2</sub> Nanosheets Obtained via the ALD-Grown WO<sub>3</sub> Sulfurization Technique as a Channel Material for Field-Effect Transistors
Р. И. Романов, Maxim G. Kozodaev, Аnna G. Chernikova, Ivan V. Zabrosaev, Anastasia Chouprik, Sergei Zarubin, Sergey M. Novikov, Valentyn S. Volkov, Andrey M. Markeev
Abstract
film (3-4 monolayers) is most challenging due to the amorphous intergrain phase formation, and further investigations focused on preventing the intergrain phase formation should be conducted.
Topics & Concepts
Materials scienceAmorphous solidPhase (matter)Atomic layer depositionTransmission electron microscopyMonolayerOptoelectronicsElectrical resistivity and conductivityChemical engineeringGrain sizeLayer (electronics)NanotechnologyAnalytical Chemistry (journal)Composite materialCrystallographyChemistryElectrical engineeringEngineeringChromatographyOrganic chemistry2D Materials and ApplicationsMXene and MAX Phase MaterialsPerovskite Materials and Applications