Fault classification and timing prediction based on shipment inspection data and maintenance reports for semiconductor manufacturing equipment
Euisuk Chung, Kyoungchan Park, Pilsung Kang
Topics & Concepts
Predictive maintenanceReliability engineeringPreventive maintenanceSemiconductor device fabricationFault (geology)Overall equipment effectivenessCorrective maintenanceEngineeringCredibilityProductivityComputer scienceLawMacroeconomicsWaferGeologySeismologyEconomicsElectrical engineeringPolitical scienceIndustrial Vision Systems and Defect DetectionFault Detection and Control SystemsManufacturing Process and Optimization