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A novel approach for bulk micromachining of 4H-SiC by tool-based electrolytic plasma etching in HF-free aqueous solution

Shunda Zhan, Bangyan Dong, Hongqiang Wang, Yonghua Zhao

2021Journal of the European Ceramic Society18 citationsDOI

Topics & Concepts

Materials scienceHydrofluoric acidEtching (microfabrication)ElectrolyteAqueous solutionDissolutionPlasma etchingSurface micromachiningEvaporationReactive-ion etchingMicroelectromechanical systemsChemical engineeringFabricationPlasmaSilanesNanotechnologyMetallurgyElectrodeComposite materialChemistrySilaneOrganic chemistryPhysical chemistryPathologyEngineeringQuantum mechanicsAlternative medicinePhysicsLayer (electronics)MedicineThermodynamicsSemiconductor materials and devicesSilicon Carbide Semiconductor TechnologiesDiamond and Carbon-based Materials Research
A novel approach for bulk micromachining of 4H-SiC by tool-based electrolytic plasma etching in HF-free aqueous solution | Litcius