Litcius/Paper detail

High-efficiency microdrilling of glass by parallel transient and selective laser processing with spatial light modulator

Reina Yoshizaki, Yusuke Ito, Kazuma Ogasawara, Akihiro Shibata, Ikuo Nagasawa, Tomokazu Sano, Keisuke Nagato, Naohiko Sugita

2022Optics & Laser Technology20 citationsDOI

Topics & Concepts

Materials scienceLaserParallel processingBiochipSpatial light modulatorFabricationTransient (computer programming)OpticsProcess (computing)OptoelectronicsSubstrate (aquarium)Image processingComputer scienceComputer hardwareNanotechnologyPhysicsArtificial intelligenceOceanographyGeologyMedicinePathologyImage (mathematics)Alternative medicineOperating systemLaser Material Processing TechniquesNanofabrication and Lithography TechniquesAdvanced Surface Polishing Techniques