Atomic level surface on aspheric quartz crucible with large sizes induced by developed green chemical mechanical polishing with composite rare earth oxides
Huiguang Sun, Zhenyu Zhang, Zinuo Zeng, Xiangxiang Cui, Cheng Fan, Yang Gu, Hongxiu Zhou, Chunjing Shi, Hao Xu
Topics & Concepts
Materials sciencePolishingCrucible (geodemography)QuartzComposite numberRare earthMetallurgyEarth (classical element)Surface (topology)Composite materialGeometryChemistryMathematical physicsComputational chemistryMathematicsPhysicsMinerals Flotation and Separation TechniquesAdvanced Surface Polishing TechniquesAdvanced ceramic materials synthesis