Oxygen annealing induced crystallization and cracking of pulsed laser deposited Ga2O3 films
Chen Wang, Shiwei Li, Yuchao Zhang, Wei‐Hang Fan, Haijun Lin, Dong‐Sing Wuu, Shui‐Yang Lien, Wen‐Zhang Zhu
Topics & Concepts
Materials scienceAmorphous solidAnnealing (glass)CrystallizationThin filmOxygenValence (chemistry)OxideChemical engineeringAnalytical Chemistry (journal)CrystallographyNanotechnologyComposite materialMetallurgyChemistryEngineeringOrganic chemistryChromatographyGa2O3 and related materialsZnO doping and propertiesGaN-based semiconductor devices and materials