Recent Developments and Applications of TiN-Based Films Synthesized by Magnetron Sputtering
Sayan Atta, Uttamchand NarendraKumar, K. V. A. N. P. S. Kumar, D. P. Yadav, S. Dash
Topics & Concepts
TinMaterials scienceSputter depositionCoatingSputteringPhysical vapor depositionTitanium nitrideTribologyMetallurgyHigh-power impulse magnetron sputteringCavity magnetronSurface engineeringComposite materialThin filmNitrideNanotechnologyLayer (electronics)Metal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchGaN-based semiconductor devices and materials