Surface integrity and material removal mechanism in fluid jet polishing of optical glass
Zhong-Chen Cao, Ming Wang, Shengqin Yan, Chenyao Zhao, Haitao Liu
Topics & Concepts
PolishingAbrasiveMaterials scienceBrittlenessSlurryParticle (ecology)Jet (fluid)Coupling (piping)Chemical-mechanical planarizationComposite materialMechanical engineeringMechanicsPhysicsEngineeringGeologyOceanographyErosion and Abrasive MachiningAdvanced Surface Polishing TechniquesParticle Dynamics in Fluid Flows