Surface topography and composition of NiPd alloys under oblique and normal gas cluster ion beam irradiation
A.E. Ieshkin, Д.С. Киреев, A. A. Tatarintsev, V. S. Chernysh, B. R. Senatulin, Е. А. Скрылева
Topics & Concepts
IrradiationIon beamSputteringIonIon beam mixingCluster (spacecraft)X-ray photoelectron spectroscopyBeam (structure)Ion beam depositionArgonMaterials scienceAnalytical Chemistry (journal)Atomic physicsChemistryOpticsThin filmNuclear magnetic resonanceNanotechnologyOrganic chemistryPhysicsNuclear physicsProgramming languageChromatographyComputer scienceIon-surface interactions and analysisIntegrated Circuits and Semiconductor Failure AnalysisDiamond and Carbon-based Materials Research