Improved wafer map defect pattern classification using automatic data augmentation based lightweight encoder network in contrastive learning
Yi Sheng, Jinda Yan, Minghao Piao
Topics & Concepts
EncoderGeneralizationComputer scienceArtificial intelligenceLabeled dataPattern recognition (psychology)Data setSet (abstract data type)Deep learningData miningWaferMachine learningEngineeringMathematicsElectrical engineeringProgramming languageOperating systemMathematical analysisIndustrial Vision Systems and Defect DetectionIntegrated Circuits and Semiconductor Failure AnalysisAdvancements in Photolithography Techniques