MEMS Pressure Sensors Design, Simulation, Manufacturing, Interface Circuits: A Review
Artyom Tulaev, А С Козлов, Jacob V. Belyaev, Vera Loboda, Mikhail A. Bellavin, A. S. Korotkov
Abstract
This article deals with the fabrication techno- logies and design techniques of pressure sensors using various sensing element (SE) materials. The comparative analysis of different reading techniques of output signal and processing circuits was discussed. Promising approaches to design and develop microelectromechanical systems (MEMS) pressure sensors were presented. It has been proven that the main design phase is input characteristics simulation for pressure sensors that are carried out by means of numeric methods. The design techniques application (simulation) enables researchers to define the output characteristics of MEMS pressure sensors such as sensitivity, linearity, and the measured pressures range.