Convolutional neural network based multi-input multi-output model for multi-sensor multivariate virtual metrology in semiconductor manufacturing
Jeongsub Choi, Mengmeng Zhu, Jihoon Kang, Myong K. Jeong
Topics & Concepts
Multivariate statisticsMetrologyConvolutional neural networkTheory of computationComputer scienceSemiconductor device fabricationMultivariate analysisSemiconductorArtificial intelligenceMachine learningAlgorithmElectrical engineeringEngineeringMathematicsStatisticsWaferIndustrial Vision Systems and Defect DetectionMineral Processing and GrindingFault Detection and Control Systems