Modeling and experiments of a nano-positioning and high frequency scanning piezoelectric platform based on function module actuator
Jie Deng, Yingxiang Liu, Shijing Zhang, JunKao Liu
Topics & Concepts
ActuatorPlanarPiezoelectricityDisplacement (psychology)BendingAcousticsPosition (finance)Inertial frame of referenceMaterials scienceEngineeringStructural engineeringComputer sciencePhysicsElectrical engineeringFinancePsychotherapistEconomicsComputer graphics (images)PsychologyQuantum mechanicsPiezoelectric Actuators and ControlForce Microscopy Techniques and ApplicationsAdvanced MEMS and NEMS Technologies