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Fabrication of heterogeneous LNOI photonics wafers through room temperature wafer bonding using activated Si atomic layer of LiNbO3, glass, and sapphire

Kaname Watanabe, Ryo Takigawa

2023Applied Surface Science17 citationsDOI

Topics & Concepts

SapphireMaterials scienceWaferFabricationWafer bondingAnodic bondingOptoelectronicsAmorphous solidSilicon on sapphireLayer (electronics)Lithium niobateSilicon on insulatorOpticsNanotechnologySiliconChemistryLaserPathologyOrganic chemistryPhysicsMedicineAlternative medicinePhotonic and Optical DevicesPhotorefractive and Nonlinear OpticsSemiconductor Lasers and Optical Devices
Fabrication of heterogeneous LNOI photonics wafers through room temperature wafer bonding using activated Si atomic layer of LiNbO3, glass, and sapphire | Litcius