Theoretical and experimental investigation of mode localization in electrostatically and mechanically coupled microbeam resonators
Saad Ilyas, Mohammad I. Younis
Topics & Concepts
MicrobeamResonatorStiffnessMode couplingPerturbation (astronomy)Coupling (piping)Materials scienceEigenvalues and eigenvectorsNormal modeExcitationMechanicsVoltageFrequency responsePhysicsControl theory (sociology)AcousticsVibrationOptoelectronicsOpticsEngineeringComputer scienceElectrical engineeringComposite materialControl (management)Quantum mechanicsArtificial intelligenceMechanical and Optical ResonatorsAdvanced MEMS and NEMS TechnologiesForce Microscopy Techniques and Applications