Enhancement of electrical performance of atomic layer deposited SnO films <i>via</i> substrate surface engineering
In‐hwan Baek, Ah-Jin Cho, Ga Yeon Lee, Heenang Choi, Sung Ok Won, Taeyong Eom, Taek‐Mo Chung, Cheol Seong Hwang, Seong Keun Kim
Abstract
Substrate surface engineering improves structural and electrical properties of ALD-grown SnO films.
Topics & Concepts
Materials scienceSubstrate (aquarium)Layer (electronics)Atomic layer depositionNanotechnologyOptoelectronicsSurface engineeringEngineering physicsOceanographyGeologyEngineeringZnO doping and propertiesSemiconductor materials and devicesElectronic and Structural Properties of Oxides