Monolithic integration of MEMS thermal flow sensor and its driving circuit onto flexible Cu on polyimide film
Ayami Kato, Yoshihiro Hasegawa, Kazuhiro Taniguchi, Mitsuhiro Shikida
Topics & Concepts
Materials scienceAirflowResistorOptoelectronicsMicroelectromechanical systemsPolyimideCapacitorVolumetric flow rateThermalPhotolithographySubstrate (aquarium)Layer (electronics)Electrical engineeringComposite materialVoltageMechanical engineeringEngineeringMeteorologyQuantum mechanicsOceanographyPhysicsGeologyAdvanced MEMS and NEMS TechnologiesAdvanced Sensor and Energy Harvesting MaterialsAdvanced Sensor Technologies Research