Suspended nanomembrane silicon photonic integrated circuits
Rongxiang Guo, Qiyue Lang, Zunyue Zhang, Haofeng Hu, Tiegen Liu, Jiaqi Wang, Zhenzhou Cheng
Abstract
Leveraging the low linear and nonlinear absorption loss of silicon at mid-infrared (mid-IR) wavelengths, silicon photonic integrated circuits (PICs) have attracted significant attention for mid-IR applications including optical sensing, spectroscopy, and nonlinear optics. However, mid-IR silicon PICs typically show moderate performance compared to state-of-the-art silicon photonic devices operating in the telecommunication band. Here, we proposed and demonstrated suspended nanomembrane silicon (SNS) PICs with light guiding within deep-subwavelength waveguide thickness for operation in the short wavelength mid-IR region. We demonstrated key building components, namely, grating couplers, waveguide arrays, micro-resonators, etc., exhibiting excellent performances in bandwidths, back reflections, quality factors, and fabrication tolerance. Moreover, we show that the proposed SNS PICs have high compatibility with the multi-project wafer foundry services. Our study provides an unprecedented platform for mid-IR integrated photonics and applications.