Epitaxial growth of β-Ga2O3 thin films on SrTiO3 (1 1 1) and (1 0 0) substrates by chemical vapor deposition
Yi‐Ming Shi, Junhua Meng, Jingren Chen, Yanmin Li, Rui Wu, Jinliang Wu, Zhigang Yin, Xingwang Zhang
Topics & Concepts
EpitaxyMaterials scienceHeterojunctionThin filmChemical vapor depositionSubstrate (aquarium)OptoelectronicsDopingSurface finishCrystallographyAnalytical Chemistry (journal)NanotechnologyComposite materialChemistryLayer (electronics)OceanographyChromatographyGeologyGa2O3 and related materialsZnO doping and propertiesElectronic and Structural Properties of Oxides