Effects of organic compounds rich in phosphate functional groups as multifunctional inhibitors on copper film chemical-mechanical polishing properties: Combined experiment and theoretical calculation
Changxin Dong, Xinhuan Niu, Chao He, Xinjie Li, Zhenhua Wu, Jiahui Li, Bin Hu, Yunhui Shi, Jiabao Cheng, Xiaodong Luan
Topics & Concepts
CopperPolishingChemical-mechanical planarizationPhosphateMaterials scienceChemical engineeringComposite materialChemistryMetallurgyOrganic chemistryEngineeringAdvanced Surface Polishing TechniquesMetal Extraction and BioleachingCorrosion Behavior and Inhibition