Structural and dielectric investigation of thermal treated TiO2/ZrO2 composite thin films grown by chemical beam vapor deposition
R. Rani, Md Kashif Shamim, William Maudez, Estelle Wagner, Radheshyam Rai, Seema Sharma, Giacomo Benvenuti
Topics & Concepts
DielectricThin filmChemical vapor depositionMaterials scienceComposite numberDissipation factorZirconiumAnalytical Chemistry (journal)Composite materialChemical engineeringNanotechnologyChemistryOptoelectronicsMetallurgyOrganic chemistryEngineeringSemiconductor materials and devicesFerroelectric and Piezoelectric MaterialsFerroelectric and Negative Capacitance Devices