Size effects on the optimization of the mechanical resistance and the electrical conductivity of Cu thin films
Simón Roa, M. Sirena
Topics & Concepts
Materials scienceNanoindentationThin filmElectrical resistivity and conductivityMicroelectromechanical systemsComposite materialElectrical resistance and conductanceScanning electron microscopeAtomic force microscopyConductivityNanotechnologyElectrical engineeringPhysical chemistryEngineeringChemistryMetal and Thin Film MechanicsCopper Interconnects and ReliabilityForce Microscopy Techniques and Applications