Magnetron sputtered transition-metal-nitrides thin films as electrode materials for supercapacitors: A review
Jialing Zhou, Shangtao Zhang, Jian Wang
Topics & Concepts
SupercapacitorMaterials scienceCavity magnetronElectrodeNitrideOptoelectronicsTransition metalThin filmMetallurgySputter depositionEngineering physicsNanotechnologyCapacitanceSputteringChemistryEngineeringLayer (electronics)BiochemistryCatalysisPhysical chemistrySupercapacitor Materials and FabricationAdvancements in Battery MaterialsMXene and MAX Phase Materials