Organosilicon compounds as single-source precursors for SiCN films production
Е. N. Ermakova, M. L. Kosinova
Topics & Concepts
OrganosiliconChemistryChemical vapor depositionThermal stabilitySiliconDeposition (geology)Chemical engineeringMoleculeDielectricChemical stabilityChemical compositionNanotechnologyOrganic chemistryMaterials scienceOptoelectronicsEngineeringPaleontologySedimentBiologyDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsSemiconductor materials and devices