Novel green chemical mechanical polishing of fused silica through designing synergistic CeO2/h-BN abrasives with lubricity
Jie Liu, Zhenyu Zhang, Chunjing Shi, Zheng Ren, Junyuan Feng, Hongxiu Zhou, Zhensong Liu, Fanning Meng, Shuming Zhao
Topics & Concepts
Materials scienceChemical-mechanical planarizationSlurryBoron nitrideSurface roughnessSurface integrityAbrasiveComposite materialLayer (electronics)NanotechnologyChemical engineeringMetallurgyEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced materials and composites