Effect of hydroxy carboxylates as complexing agent on improving chemical mechanical polishing performance of M-plane sapphire and action mechanism analysis
Minghui Qu, Xinhuan Niu, Ziyang Hou, Han Yan, Fu Luo
Topics & Concepts
SapphireMaterials scienceChemical-mechanical planarizationX-ray photoelectron spectroscopyPolishingSlurryFourier transform infrared spectroscopyChemical engineeringNuclear chemistryInorganic chemistryComposite materialChemistryOpticsPhysicsEngineeringLaserAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchLaser Material Processing Techniques