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High-aspect-ratio crack-free microstructures fabrication on sapphire by femtosecond laser ablation

Huagang Liu, Yang Li, Wenxiong Lin, Minghui Hong

2020Optics & Laser Technology79 citationsDOI

Topics & Concepts

Materials scienceSapphireFluenceLaserAblationFemtosecondFabricationMicrostructureLaser ablationOpticsOptoelectronicsAspect ratio (aeronautics)Composite materialEngineeringMedicineAlternative medicinePhysicsPathologyAerospace engineeringLaser Material Processing TechniquesNonlinear Optical Materials StudiesAdhesion, Friction, and Surface Interactions
High-aspect-ratio crack-free microstructures fabrication on sapphire by femtosecond laser ablation | Litcius