State-of-the-art and prospective progress of growing AlN substrates by physical vapor transport
Xiaogang Yao, Baoguo Zhang, Haixiao Hu, Yong Wang, Zhen Kong, Yongzhong Wu, Yongliang Shao, Xiaopeng Hao
Topics & Concepts
MicroelectronicsMaterials scienceNanotechnologySemiconductorOptoelectronicsFabricationNucleationSubstrate (aquarium)Band gapWide-bandgap semiconductorEngineering physicsElectronicsDiamondGallium nitrideChemistryComposite materialPhysicsLayer (electronics)OceanographyGeologyPathologyOrganic chemistryAlternative medicineMedicinePhysical chemistryGaN-based semiconductor devices and materialsGa2O3 and related materialsSemiconductor materials and devices