Multi-sized planar capacitive pressure sensor with ultra-high sensitivity
Sicheng Chen, Shaoshan Xin, Lei Yang, Yanjie Guo, Weiqiang Zhang, Kun Sun
Topics & Concepts
Materials scienceCapacitive sensingPlanarSensitivity (control systems)Pressure sensorOptoelectronicsPressure sensitiveNanotechnologyElectrical engineeringElectronic engineeringMechanical engineeringAdhesiveComputer scienceEngineeringLayer (electronics)Computer graphics (images)Advanced Sensor and Energy Harvesting MaterialsGas Sensing Nanomaterials and SensorsTactile and Sensory Interactions