Integrated Deep-Ultraviolet Micro-LED Array With Ultralow Contact Resistance and Ultrahigh Bandwidth for Intermixed Solar-Blind Optical Wireless Communication
Rui Wang, Huabin Yu, Muhammad Hunain Memon, Zhixiang Gao, Yuanmin Luo, Yang Kang, Yuchen Du, Zeyu Tang, Haiding Sun
Abstract
In this work, we report an integrated deep-ultraviolet (DUV) micro-LED array consisting of two distinct device sizes: one is <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$35\times 35~\mu $ </tex-math></inline-formula>m2 and the other is <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$100\times 100~\mu $ </tex-math></inline-formula>m2 (namely, 35-<inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mu $ </tex-math></inline-formula>m-LED and 100-<inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mu $ </tex-math></inline-formula>m-LED), which are fabricated with a shared common n-type electrode. Under individual device tests, we revealed that both 35-<inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mu $ </tex-math></inline-formula>m-LED and 100-<inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mu $ </tex-math></inline-formula>m-LED possess ultralow contact resistances of only <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$51~\Omega $ </tex-math></inline-formula> and <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$13~\Omega $ </tex-math></inline-formula>, respectively, while also exhibiting high bandwidth values of 527 MHz and 372 MHz, respectively, obtained in DUV optical wireless communication (DUV OWC). These values are among the best-reported values in the literature for similar micro-LEDs. Essentially, by integrating these two types of micro-LEDs on a single chip, we successfully demonstrated intermixed signal transmission and communication, which has great potential for future secured DUV OWC applications.