Atomic Layer Deposition of Large-Area Polycrystalline Transition Metal Dichalcogenides from 100 °C through Control of Plasma Chemistry
Miika Mattinen, Farzan Gity, E. Coleman, Joris F. A. Vonk, Marcel A. Verheijen, Ray Duffy, W. M. M. Kessels, Ageeth A. Bol
Abstract
on poly(ethylene terephthalate) substrates showcases the potential of our process for flexible devices. Furthermore, the composition control achieved by tailoring plasma chemistry is relevant for all low-temperature plasma-enhanced deposition processes of metal chalcogenides.
Topics & Concepts
Deposition (geology)CrystallinityCrystalliteAtomic layer depositionLayer (electronics)WaferMaterials scienceNanotechnologyTransition metalPlasmaChemical vapor depositionChemical engineeringChemistryMetallurgyComposite materialOrganic chemistryEngineeringQuantum mechanicsCatalysisSedimentBiologyPaleontologyPhysics2D Materials and ApplicationsZnO doping and propertiesPerovskite Materials and Applications