Fourier interferometry of multi-layer sample using wavelength tuning and partially negative window
Yangjin Kim, Wonjun Bae, Young Hoon Moon, Kenichi Hibino, Mamoru Mitsuishi
Topics & Concepts
Fizeau interferometerOpticsInterferometryLithium niobateFourier transformPhase (matter)WavelengthWaferAlgorithmWindow (computing)Modulation (music)WeightingRepeatabilityComputer scienceCompensation (psychology)Materials scienceMathematicsPhysicsAcousticsOptoelectronicsAstronomical interferometerMathematical analysisStatisticsPsychologyQuantum mechanicsOperating systemPsychoanalysisOptical measurement and interference techniquesSurface Roughness and Optical MeasurementsAdvanced Measurement and Metrology Techniques