Suspended nanomembrane silicon micro-disk for cross-sensitivity-free, high-concentration, large-dynamic range CO2 sensing
Qiyue Lang, Rongxiang Guo, Si Chen, Yichen Liu, Xingyu Liu, Zunyue Zhang, Tiegen Liu, Jiaqi Wang, Zhenzhou Cheng
Topics & Concepts
Sensitivity (control systems)Dynamic rangeMaterials scienceRange (aeronautics)SiliconOptoelectronicsNanotechnologyOpticsElectronic engineeringPhysicsComposite materialEngineeringAdvanced Sensor and Energy Harvesting MaterialsAdvanced Fiber Optic SensorsAdvanced MEMS and NEMS Technologies