Recrystallization behavior, oxygen vacancy and photoluminescence performance of sputter-deposited Ga2O3 films via high-vacuum in situ annealing
Haiyan Wang, Chunmei Tang, Weijia Yang, Jingjing Zhao, Lihua Liu, Jianxun Mu, Yupeng Zhang, Caiyou Zeng
Topics & Concepts
Materials scienceAnnealing (glass)PhotoluminescenceAmorphous solidMicrostructureRecrystallization (geology)Sputter depositionCrystallinityVacancy defectAnalytical Chemistry (journal)In situSputteringNanocrystalline materialChemical engineeringThin filmCrystallographyNanotechnologyOptoelectronicsMetallurgyComposite materialChemistryChromatographyOrganic chemistryPaleontologyEngineeringBiologyGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques