Nano-Displacement Measurement System Using a Modified Orbital Angular Momentum Interferometer
Huali Lu, Yuanyuan Hao, Chenji Guo, Xunhua Huang, Hui Hao, Dongmei Guo, Hua Zhao, Wanchun Tang, Peng Wang, Hongpu Li
Abstract
In this study, a nano-displacement measurement system is proposed and demonstrated both theoretically and experimentally, which was based on a modified Mach-Zehnder (M-Z) interferometer using two conjugated orbital angular momentum (OAM) beams. In contrast to the previous M-Z-based OAM interferometer, a reflection module is inserted into the reference arm instead of a simple mirror. As a result, the effect of the transverse position-dependence phase-shift caused by the dove prism can be clearly eliminated and a stable and robust (off-axis insensitive) petal-like interference pattern can be obtained successfully. More importantly, a significant rotation angle of the petal-like pattern vs. the tiny displacement of the tested object can be clearly observed. In accordance with the modified measurement setup, a novel phase-demodulation method enabling to quickly and accurately characterize the rotation angle of the petal-like interference-patterns is proposed and demonstrated also. A tiny displacement ranging from 50 to 800 nm with resolution of <inline-formula> <tex-math notation="LaTeX">$\sim 50$ </tex-math></inline-formula> pm has been measured successfully. The proposed approach may find applications in not only the ultra-high precision displacement sensor, but also the temperature, strain, and refractive index sensors.