Macro and micro-nano machining mechanism for ultrasonic vibration assisted chemical mechanical polishing of sapphire
Mufang Zhou, Yuanyao Cheng, Min Zhong, Wenhu Xu
Topics & Concepts
SapphireChemical-mechanical planarizationMaterials sciencePolishingSurface integrityMachiningSurface roughnessGrindingAbrasiveComposite materialX-ray photoelectron spectroscopySurface finishOptoelectronicsOpticsMetallurgyChemical engineeringLaserPhysicsEngineeringAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationLaser Material Processing Techniques