Effect of temperature on surface morphology of single-crystal silicon in nanometric cutting
Xiao Chen, Jianning Chu, Zhanchen Zhu, Changlin Liu
Topics & Concepts
Morphology (biology)Materials scienceSiliconNanotechnologySingle crystalChemical engineeringComposite materialOptoelectronicsCrystallographyChemistryGeologyPaleontologyEngineeringAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationDiamond and Carbon-based Materials Research