Resonant Accelerometers Based on Nanomechanical Piezoresistive Transduction
Théo Miani, Thierry Verdot, A. Berthelot, Federico Maspero, Alexandra Koumela, Philippe Robert, Giacomo Langfelder, Julien Arcamone, Marc Sansa
Abstract
We present the design, fabrication and characterization of a resonant accelerometer combining piezoresistive nanoresonators with a micrometric proof mass, achieving at the same time an exceptional frequency sensitivity (up to 10%/g) and a large bandwidth (1.5 kHz) with respect to conventional technologies. These sensors are fabricated with a 200 mm MEMS technology.
Topics & Concepts
Piezoresistive effectAccelerometerMicroelectromechanical systemsBandwidth (computing)FabricationMaterials scienceSensitivity (control systems)Proof massCharacterization (materials science)Transduction (biophysics)OptoelectronicsElectronic engineeringElectrical engineeringNanotechnologyEngineeringComputer scienceTelecommunicationsChemistryAlternative medicineBiochemistryMedicinePathologyOperating systemMechanical and Optical ResonatorsAdvanced MEMS and NEMS TechnologiesForce Microscopy Techniques and Applications