Atomic and close-to-atomic scale polishing of Lu2O3 by plasma-assisted etching
Peng Lyu, Min Lai, Ze Liu, Fengzhou Fang
Topics & Concepts
PolishingMaterials scienceChemical-mechanical planarizationEtching (microfabrication)LutetiumOxideSurface roughnessSlurrySurface finishPlasmaPlasma etchingSurface modificationReactive-ion etchingMetallurgyComposite materialChemical engineeringYttriumPhysicsQuantum mechanicsEngineeringLayer (electronics)Semiconductor materials and devicesElectronic and Structural Properties of OxidesDiamond and Carbon-based Materials Research