High-performance SiO2-SiNx distributed Bragg reflectors fabricated by ion-assisted reactive magnetron sputtering
Yu Jiang, Daoming You, Yingchun Cao, Wentao Guo, Manqing Tan
Topics & Concepts
Materials scienceSputteringSputter depositionOptoelectronicsAmorphous solidSiliconX-ray photoelectron spectroscopySurface roughnessRaman spectroscopyCavity magnetronNitrideOpticsThin filmComposite materialNanotechnologyLayer (electronics)Chemical engineeringChemistryOrganic chemistryPhysicsEngineeringAdvanced Fiber Optic SensorsPhotonic and Optical DevicesOptical Coatings and Gratings