Optical, structural and electrical properties of sputtered ultrathin chromium films
Anna Sytchkova, Alexandr Belosludtsev, Lina Volosevičienė, Remigijus Juškėnas, Rimantas Simniškis
Topics & Concepts
Materials scienceEllipsometryX-ray reflectivityCrystalliteAnalytical Chemistry (journal)Thin filmSputter depositionChromiumElectrical resistivity and conductivitySputteringOpticsNanotechnologyMetallurgyChemistryChromatographyElectrical engineeringEngineeringPhysicsCopper Interconnects and ReliabilityMetal and Thin Film MechanicsSemiconductor materials and devices