Litcius/Paper detail

Effects of bubble behaviors in femtosecond laser machining of silicon wafer in liquids

Wentao Tian, Zhiwen Wang, Chengjin Wang, Dongfeng Qi, Hongyu Zheng

2022Journal of Manufacturing Processes25 citationsDOI

Topics & Concepts

Materials scienceCavitationShadowgraphWaferBubbleLaserFemtosecondSiliconOpticsComposite materialOptoelectronicsMechanicsPhysicsLaser Material Processing TechniquesLaser-Ablation Synthesis of NanoparticlesOcular and Laser Science Research