Effects of bubble behaviors in femtosecond laser machining of silicon wafer in liquids
Wentao Tian, Zhiwen Wang, Chengjin Wang, Dongfeng Qi, Hongyu Zheng
Topics & Concepts
Materials scienceCavitationShadowgraphWaferBubbleLaserFemtosecondSiliconOpticsComposite materialOptoelectronicsMechanicsPhysicsLaser Material Processing TechniquesLaser-Ablation Synthesis of NanoparticlesOcular and Laser Science Research