Preparation and characterization of chromium oxide thin films: The response of morphology, crystal structure, and electrical properties to oxygen pressure under magnetron sputtering
Zhenmin Li, Baosen Mi, Xun Ma, Ping Liu, Fengcang Ma, Ke Zhang, Xiaohong Chen, Xinfa Zhu, Yi Meng, LU Hong-mei, Wei Li, Wei Li
Topics & Concepts
Partial pressureMaterials scienceSputteringSputter depositionMicrostructureOxygenOxideChromiumDopingStoichiometryCavity magnetronThin filmChemical engineeringAnalytical Chemistry (journal)NanotechnologyMetallurgyOptoelectronicsChemistryPhysical chemistryChromatographyOrganic chemistryEngineeringZnO doping and propertiesAdvanced Photocatalysis TechniquesCopper-based nanomaterials and applications