Piezoresistive pressure sensor using nanocrystalline silicon thin film on flexible substrate
Vivek Pandey, Aparajita Mandal, Swapnil M.Sisle, M. P. Gururajan, Rajiv O. Dusane
Topics & Concepts
Materials sciencePolyimidePiezoresistive effectPressure sensorSiliconSubstrate (aquarium)Wheatstone bridgeOptoelectronicsNanocrystalline materialMicroelectromechanical systemsSurface micromachiningGauge factorThin filmRaman spectroscopyHydrostatic pressureComposite materialNanotechnologyFabricationLayer (electronics)OpticsElectrical engineeringAlternative medicineOceanographyPhysicsVoltageEngineeringMedicineThermodynamicsResistorGeologyPathologyMechanical and Optical ResonatorsAdvanced MEMS and NEMS TechnologiesAdvanced Sensor and Energy Harvesting Materials