Litcius/Paper detail

An ensemble-based deep semi-supervised learning for the classification of Wafer Bin Maps defect patterns

Siyamalan Manivannan

2022Computers & Industrial Engineering29 citationsDOI

Topics & Concepts

Artificial intelligenceComputer scienceConvolutional neural networkWaferBinPattern recognition (psychology)Deep learningSemiconductor device fabricationProcess (computing)SmoothingIdentification (biology)Machine learningData miningEngineeringAlgorithmBiologyComputer visionBotanyOperating systemElectrical engineeringIndustrial Vision Systems and Defect DetectionIntegrated Circuits and Semiconductor Failure AnalysisAdvancements in Photolithography Techniques