An ensemble-based deep semi-supervised learning for the classification of Wafer Bin Maps defect patterns
Siyamalan Manivannan
Topics & Concepts
Artificial intelligenceComputer scienceConvolutional neural networkWaferBinPattern recognition (psychology)Deep learningSemiconductor device fabricationProcess (computing)SmoothingIdentification (biology)Machine learningData miningEngineeringAlgorithmBiologyComputer visionBotanyOperating systemElectrical engineeringIndustrial Vision Systems and Defect DetectionIntegrated Circuits and Semiconductor Failure AnalysisAdvancements in Photolithography Techniques