MLR-WM-ViT: Global high-performance classification of mixed-type wafer map defect using a multi-level relay Vision Transformer
Xiangyan Zhang, Xuexiu Liang, Ying Zhang, Jian Li, Shimin Wei
Topics & Concepts
RelayComputer scienceTransformerWaferArtificial intelligencePattern recognition (psychology)Computer visionElectrical engineeringVoltageEngineeringPhysicsPower (physics)Quantum mechanicsIndustrial Vision Systems and Defect DetectionIntegrated Circuits and Semiconductor Failure AnalysisAdvanced Surface Polishing Techniques