Aluminium-assisted chemical etching for fabrication of black silicon
Shahnawaz Uddin, M.R. Hashim, Mohd Zamir Pakhuruddin
Topics & Concepts
Materials scienceSiliconWaferNanoporeAluminiumIsotropic etchingFabricationEtching (microfabrication)Black siliconAnnealing (glass)OptoelectronicsNanotechnologyComposite materialLayer (electronics)Alternative medicinePathologyMedicineNanowire Synthesis and ApplicationsSilicon Nanostructures and PhotoluminescenceAdvancements in Semiconductor Devices and Circuit Design