Integrated on-site collection and off-site analysis of airborne molecular contamination in cleanrooms for integrated circuit manufacturing processes
Ruiqing Chen, Angus Shiue, Junjie Liu, Yuan Zhi, Dingchao Zhang, Fiona Xia, Graham Leggett
Topics & Concepts
CleanroomEthylbenzeneContaminationPhthalateEnvironmental chemistryBTEXEnvironmental scienceVolatilisationBenzeneHEPAEnvironmental engineeringTolueneDibutyl phthalateWaste managementChemistryXyleneFilter (signal processing)Materials scienceOrganic chemistryEngineeringNanotechnologyEcologyBiologyElectrical engineeringRecycling and Waste Management TechniquesAdditive Manufacturing and 3D Printing TechnologiesExperience-Based Knowledge Management