24.4% industrial tunnel oxide passivated contact solar cells with ozone-gas oxidation Nano SiOx and tube PECVD prepared in-situ doped polysilicon
Zunke Liu, Na Lin, Qingshan Zhang, Bin Yang, Lihua Xie, Yan Chen, Wangpeng Li, Mingdun Liao, Hui Chen, Wei Liu, Yuming Wang, Shihua Huang, Baojie Yan, Yuheng Zeng, Yimao Wan, Jichun Ye
Topics & Concepts
Plasma-enhanced chemical vapor depositionPassivationX-ray photoelectron spectroscopyAnnealing (glass)OzoneMaterials scienceAnalytical Chemistry (journal)OxideChemical vapor depositionSaturation currentGlow dischargePlasmaChemical engineeringChemistryNanotechnologyLayer (electronics)Composite materialMetallurgyVoltageElectrical engineeringOrganic chemistryEngineeringPhysicsQuantum mechanicsSilicon and Solar Cell TechnologiesThin-Film Transistor TechnologiesSilicon Nanostructures and Photoluminescence